The effect of the parameter of the spring beam on resonant frequency , sensitivity , cross sensitivity of the structure of the accelerometer , the effect of the electrostatic force on the accelerometer , the dynamic performance of the accelerometer are analyzed 论文采用了一种新的建模仿真法，即原理级描述仿真法，建立了叉指式微加速度计的参数化机电混合系统模型，对其进行分析研究。
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